4.5 Article

Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition

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Thermal ranges and figures of merit for gold-containing precursors for atomic layer deposition

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Summary: This survey focuses on known gold-containing chemical vapor deposition (CVD) and atomic layer deposition (ALD) precursors, collecting data on their volatilization and decomposition. A figure of merit (sigma) is used to assess thermal characteristics, with some gold ALD precursors showing high potential. Gold(I) compounds with certain oxidation states have good figures of merit, while beta -diketonates and beta -ketoiminates of gold are particularly promising with high sigma values. A potential synthetic route for these compounds may make them competitive as precursors.

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