Journal
JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY
Volume 327, Issue 2, Pages 905-911Publisher
SPRINGER
DOI: 10.1007/s10967-020-07564-0
Keywords
GaAs; Bubbles and dislocations; Density function theory; Interface separation
Funding
- National Nature Science Foundation of China [61505003, 61674140]
- Beijing education commission project [SQKM201610005008]
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The cross-sectional morphology of GaAs/Si3N4/SiO2 composite wafer after He+ implantation was systematically observed, revealing the formation of bubbles and dislocations in the GaAs material, as well as interface separation and micro-gap after annealing. These observations were explained by density function theory calculations.
The cross-sectional morphology of GaAs/Si3N4/SiO2 composite wafer after He+ implantation has been systematically observed. Experiment sample is prepared by focused ion beam system to meet the observation requirements of transmission electron microscope. The results show that implantation of 300 keV, 5 x 10(16)/cm(2) He+ gives rise to formation of bubbles and dislocations in GaAs material, but no cracks are observed. In addition, after annealing, interface separation and micro-gap appear at the interface between GaAs layer and Si3N4 layer. Finally, the mechanisms of bond fracture and blisters formation at the interface are explained by density function theory calculation.
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