4.4 Article

Generation of ZnO nanoparticles by chemical vapor synthesis using quenching air

Journal

JOURNAL OF NANOPARTICLE RESEARCH
Volume 23, Issue 2, Pages -

Publisher

SPRINGER
DOI: 10.1007/s11051-021-05145-0

Keywords

Zinc oxide nanoparticle synthesis; Chemical vapor synthesis; Tubular quencher; Quenching air; Yield; Conversion ratio

Funding

  1. Taiwan Ministry of Science and Technology [MOST 109-2622-8-009-017-TE5]
  2. Higher Education Sprout Project of National Chiao Tung University
  3. Ministry of Education

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The study showed that the quenching air flow rate has a significant impact on the generation and characteristics of zinc oxide nanoparticles during chemical vapor synthesis, allowing for control over the geometric mean diameter and total number concentration of the nanoparticles by adjusting the quenching air flow rate. Additionally, increasing the quenching rate can decrease the size of zinc oxide nanoparticles below 10 nm under constant carrier gas flow rate and furnace temperature.
With the increasing interest in manufacturing nano-sized metal particles in large quantities for their numerous applications in industry, medicine and daily life as well as nanotoxicity testing, there is a critical demand to improve methods to generate nanoparticles with controllable nano-size and high number concentrations. Here, a stable method for the generation of zinc oxide nanoparticles (ZnO-NPs), especially for the size below 10 nm, by chemical vapor synthesis (CVS) using quenching air was proposed. The present study found that the oxidation step of Zn vapor in the ZnO-NP formation process is the rate-controlling step. Six conditions were tested with various furnace temperatures, carrier gas and quenching air flow rates in a tubular furnace. The experimental results showed that the quenching air flow rates (1-5 L/min) have a great impact on ZnO-NPs generation and characteristics. The geometric mean diameter of synthesized ZnO-NPs or aggregates was decreased from 15.26 to 3.27 nm, the total number concentration was increased from 2.56x10(7) to 4.28x10(7)cm(3) and the morphology changed from tetrapod-shaped to isometric-shaped when the quenching air flow rate was increased from 1 to 5 L/min at 1 L/min carrier gas flow rate and 500 degrees C furnace temperature. The diameter and concentration remained stable with only small fluctuations for 5 h at all test conditions, which is very useful for nanotoxicity testing. The size of ZnO-NPs was decreased below 10 nm when the quenching rate was 11,000 K/s or higher at 1 L/min carrier gas flow rate and 500 degrees C furnace temperature. The experimental yield of ZnO-NPs was found to be 11.93% at 600 degrees C furnace temperature and less than 1.5% at 500 degrees C. The low yield of small ZnO-NPs is mainly attributed to the low conversion ratio of Zn vapor by the oxidation reaction, and convection-diffusion deposition loss of Zn vapor, ZnO vapor and small ZnO-NPs, which needs further improvement for future mass production using CVS method.

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