Toward 40GHz excitation of diamond-based HBAR

We have obtained an excitation of longitudinal bulk acoustic waves in a diamond-based High overtone Bulk Acoustic Resonator (HBAR) at microwave and enhanced frequency bands as EHF up to 40GHz. As an effective piezoelectric transducer, an aluminum-scandium nitride film is employed. The frequency response of acoustic overtones excited in the HBARs with a different aperture in the 1.0 up to 40GHz range is measured. Some peculiarities of HBAR's frequency response concerned with the thin film piezoelectric transducer are studied. It is established that the maximal magnitude of the quality factor varies near the value of about 10000 within all the frequency bands investigated. The approximately frequency-independent Q-factor behavior can explain in terms the Landau-Rumer approximation describing the acoustic attenuation in a diamond. An estimation of the HBAR's quality parameter as Qxf approximate to 4x10(14)Hz at 40GHz is obtained. In our opinion, that value exceeds all known data among the given devices. The results obtained will be helpful in the development of microwave and EHF acoustic resonators as well as highly sensitive acoustic sensors. The development of the EHF band opens up the possibility of obtaining acoustic waves of submicrometer and nanometer scales (in various media) and implementing acoustic studies of micro- and nanoobjects.

Automated summary

Researchers have successfully excited longitudinal bulk acoustic waves at frequencies up to 40GHz in a diamond-based High overtone Bulk Acoustic Resonator (HBAR) using an aluminum-scandium nitride film as an effective piezoelectric transducer. They also studied peculiarities of the HBAR's frequency response and acoustic attenuation in diamond.