4.8 Article

Oxygen-Assisted Trimming Growth of Ultrahigh Vertical Graphene Films in a PECVD Process for Superior Energy Storage

Journal

ACS APPLIED MATERIALS & INTERFACES
Volume 13, Issue 10, Pages 12400-12407

Publisher

AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c00544

Keywords

ultrahigh vertical graphene; PECVD; oxygen-assisted trimming; height saturation; morphology trimming

Funding

  1. National Key R&D Program of China [2017YFA0304203]
  2. National Natural Science Foundation of China [21805174, 51902190]
  3. Key Research and Development Program of Shanxi Province for International Cooperation [201803D421082]
  4. Applied Basic Research Project of Shanxi Province [201801D221100]
  5. College Science and Technology Innovation Program of Shanxi Province [2019L0013, 2019L0018]
  6. Graduate Education Innovation Program of Shanxi Province [2019SY013]
  7. 111 Project [D18001]
  8. Changjiang Scholars and Innovative Research Team in University of Ministry of Education of China [IRT_17R70]
  9. Fund for Shanxi 1331 Project Key Subjects Construction

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By using an oxygen-assisted trimming process, the height limitation of VG films can be overcome, allowing the height of VGs to reach up to 80 micrometers. As supercapacitor electrodes, VG films exhibit superior electrochemical properties, showing potential applications in energy storage.
Combining the advantages of a three-dimensional structure with intrinsic properties of graphene, vertical graphene (VG) synthesized by the plasma-enhanced chemical vapor deposition (PECVD) process has shown great promise to be applied to energy-storage electrodes. However, the practical application of the VG electrodes suffers from the limited height, which is mostly in a scale of few hundreds of nanometers, as shown in the previous studies. The reason for the unacceptable thin VG film deposition is believed to be the height saturation, stemming from the inevitable confluence of the VG flakes along with the deposition time. In this study, we developed an oxygen-assisted trimming process to eliminate the overfrondent graphene nanosheets thereby surmounting the saturation of the VG thickness during growth. In this approach, the height of the VGs reaches as high as 80 mu m. Tested as supercapacitor electrodes, a desirable capacitance of 241.35 mF cm(-2) is obtained by the VG films, indicating the superior electrochemical properties and the potential for applications in energy storage. It is worth noting, this thickness is by no means the maximum that can be achieved with our synthesis technique and higher capacitance can be achieved by conducting the circulating deposition-correction process in our work.

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