Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography

This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microstructures are simulated by controlling the high-reflectivity mirror group to adjust the incidence angle. This study indicates that the incidence angle has a considerable influence on the shape and period of the lattice, thereby contributing to the fabrication of microstructures with different arrangements. These structures include donut, circle, D-type, rectangular, triangular, U-type, and honeycomb lattices. The six-beam laser interference lithography technique is expected to benefit microstructure fabrication because of its simple operation, large writing area, and low cost, thereby promoting the development of micro-optics.

Automated summary

This study demonstrates the fabrication of diverse microstructures by controlling the angle of incidence in a six-beam laser interference lithography system, which significantly influences the shape and period of the lattice. The technique is expected to benefit microstructure fabrication due to its simple operation, large writing area, and low cost, promoting the development of micro-optics.