Journal
JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 54, Issue -, Pages 62-71Publisher
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S1600576720014764
Keywords
V-pits; X-ray diffraction; InGaN; reciprocal space maps; strain
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Funding
- Japan-V4 Advanced Material Joint Call [V4-JAP/1/2016]
- Czech Ministry of Education, Youth and Sports [WISEGaN 8F15002]
- NanoCent project - European Regional Development Fund (ERDF) [CZ.02.1.01/0.0/0.0/15.003/0000485]
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This study investigates V-pit defects in InGaN/GaN and finds that the formation of V-pits is a sufficient mechanism for strain relaxation, with no observed plastic relaxation caused by misfit dislocations in the epilayers.
V-pit defects in InGaN/GaN were studied by numerical simulations of the strain field and X-ray diffraction (XRD) reciprocal space maps. The results were compared with XRD and scanning electron microscopy (SEM) experimental data collected from a series of samples grown by metal-organic vapor phase epitaxy. Analysis of the principal strains and their directions in the vicinity of V-pits explains the pseudomorphic position of the InGaN epilayer peak observed by X-ray diffraction reciprocal space mapping. The top part of the InGaN layer involving V-pits relieves the strain by elastic relaxation. Plastic relaxation by misfit dislocations is not observed. The creation of the V-pits appears to be a sufficient mechanism for strain relaxation in InGaN/GaN epilayers.
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