4.7 Article

Probing layered structure of Inconel 625 coatings prepared by magnetron sputtering

Journal

SURFACE & COATINGS TECHNOLOGY
Volume 405, Issue -, Pages -

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2020.126545

Keywords

Inconel 625 alloy coating; Magnetron sputtering; Coating/substrate interface; Oxide layer; X-ray reflectometry

Funding

  1. U.S. Department of Energy's Office of Energy Efficiency and Renewable Energy (EERE) under the Generation 3 Concentrated Solar Power (CSP) Systems [DE-EE0008380]
  2. Nuclear Regulatory Commission [NRC-HQ-84-15-G-0018]

Ask authors/readers for more resources

The study reveals the layered structure of Inconel 625 coatings, including a 2 nm thick Cr-rich Inconel sublayer and a 2 nm thick oxide layer primarily composed of NiO. By comparing coatings with different deposition times, it was found that the thickness of the principal Inconel 625 layer grows linearly with deposition time, while other layers remain constant.
Coating/substrate interface and oxide layers present in Inconel 625 film may cause significant impacts on its corrosion behavior. However, layered structure of Inconel 625 coatings remains poorly understood due to its requirement of high spatial resolution. This study applies X-ray reflectometry (XRR) to probe the layered structure of magnetron-sputtered Inconel 625 film with atomic spatial resolution. Our results indicate that there exists a 2 nm thick Cr-rich Inconel sublayer underneath the principal film. On top of the principal film, it is found a 2 nm thick oxide layer mainly consisting of NiO. In addition, we detected similar to 2 angstrom contamination layer on the sapphire substrate, although argon ion sputter cleaning had been applied to the substrate prior to deposition. By comparing the coatings with different deposition time, we observed that the thickness of principal Inconel 625 layer grows linearly with deposition time, with all other layers remaining constant. Our findings provide insight into the layered structures of Inconel 625 coatings with atomic-scale spatial resolution, and provide directions for future efforts that aim to improve the corrosion resistance of Inconel 625 coatings.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.7
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available