Journal
SURFACE & COATINGS TECHNOLOGY
Volume 403, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2020.126417
Keywords
High entropy nitride; Hardness; Residual stress; Tribological characteristic; High temperature
Funding
- High Entropy Materials Center from The Featured Areas Research Center Program within the framework of the Higher Education Sprout Project by the Ministry of Education (MOE)
- Ministry of Science and Technology, Taiwan (MOST) [MOST 109-2634-F-007-024]
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The high entropy nitride coatings (Cr0.35Al0.25Nb0.12Si0.08V0.20)N with high hardness of 35 GPa and a high H-3/E-2 of 0.52 were fabricated by RF magnetron sputtering system via tuning the processing parameters, such as substrate temperature and bias. The chemical composition, crystal structure, grain size, and residual stress were measured and analyzed to determine the mechanisms of hardness improvement. The crystal structure maintained B1 face-center cubic structure throughout all the conditions. The hardness was improved from 28 GPa to 35 GPa by sputtering at 300 degrees C with -150 V bias. Such hardness was achieved due to increased densification and compressive residual stress. Furthermore, the wear test of high hardness and high value of H-3/E-2 coatings were performed at both ambient temperature and 600 degrees C. The correlation among H-3/E-2, oxidation resistance, and wear rate was addressed and discussed.
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