Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 316, Issue -, Pages -Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2020.112412
Keywords
Relative humidity; Heterodyne interferometer; Total-internal-reflection; Phase-enhancement
Funding
- Ministry of Science and Technology, Taiwan, R. O. C. [109-2221-E-018-020]
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This study presents an optical relative humidity (RH) sensor based on the hydrophilic feature of a polyvinyl alcohol (PVA) film and a phase-enhancement total-internal-reflection (TIR) heterodyne interferometer. The sensor operation is based on the interaction of a TIR evanescent wave with a PVA film coated on the base of a phase-enhancement TIR apparatus. Relative humidity influences the PVA refractive index, thus bringing a significant variation in the phase difference between the sand ppolarized states of a beam completely reflected from the TIR apparatus. The phase difference variation can be obtained using heterodyne interferometric technique, and the relative humidity measurement therefore is realized. In this study, the sensor produced measurement sensitivity and resolution superior to 0.49?/% RH and 0.5% RH in the range of 30%-75% RH. (C) 2020 Elsevier B.V. All rights reserved.
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