Journal
SENSORS
Volume 20, Issue 23, Pages -Publisher
MDPI
DOI: 10.3390/s20236788
Keywords
guided-mode resonance; planar waveguide structure; humidity sensor; sensitivity; resonance wavelength; figure of merit
Funding
- Slovak National Grant Agency under the project VEGA [1/0540/18]
- Slovak Research and Development Agency [APVV-16-0129, APVV-19-0602]
- ERDF/ESF project New Composite Materials for Environmental Applications [CZ.02.1.01/0.0/0.0/17_048/0007399, SP2020/45]
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In this paper, we present a new type of guided-mode resonance (GMR)-based sensor that utilizes a planar waveguide structure (PWS). We employed a PWS with an asymmetric three-layer waveguide structure consisting of substrate/Au/photoresist. The ellipsometric characterization of the structure layers, the simulated reflectance spectra, and optical field distributions under GMR conditions showed that multiple waveguide modes can be excited in the PWS. These modes can be used for refractive index sensing, and the theoretical analysis of the designed PWS showed a sensitivity to the refractive index up to 6600 nm per refractive index unit (RIU) and a figure of merit (FOM) up to 224 RIU-1. In response to these promising theoretical results, the PWS was used to measure the relative humidity (RH) of moist air with a sensitivity up to 0.141 nm/%RH and a FOM reaching 3.7 x 10(-3)%RH-1. The results demonstrate that this highly-sensitive and hysteresis-free sensor based on GMR has the potential to be used in a wide range of applications.
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