Journal
PLASMA PROCESSES AND POLYMERS
Volume 18, Issue 3, Pages -Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.202000208
Keywords
alloy nanoparticle; gas aggregation cluster source; gas‐ phase synthesis; in operando optical emission spectroscopy; sputter deposition
Funding
- Deutsche Forschungsgemeinschaft [FOR2093, PO2299/1-1]
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The use of multicomponent targets enables the gas-phase synthesis of alloy nanoparticles, with optical emission spectroscopy being suggested as a versatile diagnostic tool for composition control. This correlation allows precise in operando control of alloy NP composition obtained from multicomponent targets.
The use of multicomponent targets allows the gas-phase synthesis of a large variety of alloy nanoparticles (NPs) via gas aggregation sources. However, the redeposition of sputtered material impacts the composition of alloy NPs, as demonstrated here for the case of AgAu alloy NPs. To enable NPs with tailored Au fractions, in operando control over the composition of the NPs is in high demand. We suggest the use of optical emission spectroscopy as a versatile diagnostic tool to determine and control the composition of the NPs. A strong correlation between operating pressure, intensity ratio of Ag and Au emission lines, and the obtained NP compositions is observed. This allows precise in operando control of alloy NP composition obtained from multicomponent targets.
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