4.5 Article

Mass-to-charge ion composition of plasma in a magnetron discharge with reactive sputtering of titanium target

Related references

Note: Only part of the references are listed.
Article Materials Science, Multidisciplinary

Microstructure and optical properties of TiO2- and HA-coated Ti6Al7Nb alloy by sol-gel method

Nihat Tosun et al.

BULLETIN OF MATERIALS SCIENCE (2020)

Article Materials Science, Multidisciplinary

Room temperature sputtered titanium oxynitride thin films: The influence of oxygen addition

Phalakorn Khwansungnoen et al.

THIN SOLID FILMS (2020)

Review Engineering, Mechanical

Synthesis of TiN and TiO2thin films by cathodic cage plasma deposition: a brief review

L. H. P. Abreu et al.

JOURNAL OF THE BRAZILIAN SOCIETY OF MECHANICAL SCIENCES AND ENGINEERING (2020)

Article Materials Science, Multidisciplinary

Nanoscale Multi-Layer Thin Film Fabricated by Cathodic Arc Evaporation (CAE) Method

Gholamreza Faghani et al.

JOURNAL OF SUPERHARD MATERIALS (2020)

Article Instruments & Instrumentation

Ion beam measurements for the investigation of TiN thin films deposited on different substrates by vacuum arc discharge

B. Abdallah et al.

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS (2019)

Article Materials Science, Multidisciplinary

Structure and corrosion properties of thin TiO2 films obtained by magnetron sputtering

A. Kozlovskiy et al.

VACUUM (2019)

Article Physics, Applied

Ion mass-to-charge ratio in planar magnetron plasma with electron injections

M. Shandrikov et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2018)

Article Materials Science, Multidisciplinary

Electrochromic properties of TiO2 thin films grown by thermionic vacuum arc method

Erbil Silik et al.

THIN SOLID FILMS (2017)

Article Physics, Condensed Matter

Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures

D. V. Dukhopel'nikov et al.

JOURNAL OF SURFACE INVESTIGATION (2016)

Article Instruments & Instrumentation

Modified quadrupole mass analyzer RGA-100 for beam plasma research in forevacuum pressure range

D. B. Zolotukhin et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2015)

Article Chemistry, Multidisciplinary

Investigation on F-B-S tri-doped nano-TiO2 films for the photocatalytic degradation of organic dyes

Fang Li et al.

JOURNAL OF NANOPARTICLE RESEARCH (2011)

Article Materials Science, Multidisciplinary

Oxygen plasma induced hydrophilicity of TiO2 thin films

Kuan-Xiang Zhang et al.

VACUUM (2011)

Article Materials Science, Coatings & Films

Porous TiO2 film prepared by micro-arc oxidation and its electrochemical behaviors in Hank's solution

Xingling Shi et al.

SURFACE & COATINGS TECHNOLOGY (2010)

Article Physics, Applied

Titanium Nitride Grown by Sputtering for Contacts on Boron-Doped Diamond

Vincent Mortet et al.

PLASMA PROCESSES AND POLYMERS (2007)

Article Materials Science, Multidisciplinary

Reactive magnetron sputtering of thin films: present status and trends

J Musil et al.

THIN SOLID FILMS (2005)

Article Physics, Nuclear

The AME2003 atomic mass evaluation (II). Tables, graphs and references

G Audi et al.

NUCLEAR PHYSICS A (2003)

Article Engineering, Electrical & Electronic

Electrical properties of TiN films deposited by filtered cathodic vacuum arc

YH Cheng et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2002)

Article Materials Science, Multidisciplinary

Magnetron sputtering: a review of recent developments and applications

PJ Kelly et al.

VACUUM (2000)