Journal
OPTICS EXPRESS
Volume 28, Issue 25, Pages 38206-38222Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.411933
Keywords
-
Categories
Funding
- Engineering and Physical Sciences Research Council [EP/V000624/1]
Ask authors/readers for more resources
In this paper, we analyse the performance of a silicon nano-opto-electro-mechanical system (NOEMS) applied as an optical modulator, based on a suspended slot waveguide driven by electrostatic forces. The analysis is carried out with the help of the finite element analysis (FEA) method involving the influences from Casimir force, optical force and electrostatic force. The performance of the modulator are analysed from aspects of actuating modes, actuating voltage, modulating frequency, effective index, phase change, and energy consumption using the FEA method. Simulation results show that a suspended slot modulator has the advantages of low actuation voltage, low power consumption, as well as large effective index and phase change compared with modulators based upon other approaches. The performance of such a modulator can fill the performance gap between the carrier-based approach and micro-optoelectro-mechanical system (MOEMS) approach for modulation. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available