Characterization of Sputtered Coatings with Various Nitrogen Content Deposited from High Aluminum Alloyed TiAlV Target

In this study, a Ti50Al40V10 single alloying target is used to deposit TiAlVN coatings by a direct current (dc) magnetron sputtering technique. The structural, mechanical, and frictional properties of final coatings deposited at a various N-2 content are investigated. It reveals that TiAlVN coating transforms from a single-phase (cubic phase) to a dual-phase structure (cubic and hexagonal phases) with the increase of N-2 content. The highest hardness (similar to 36.5 GPa) and elastic modulus (similar to 372 GPa), and a good adhesion strength (similar to 24.4 N) are achieved in the sample deposited with a N-2 flow rate of 6 sccm, which are determined by the nano-indentation and scratch test measurements. In addition, TiAlVN coating deposited with a N-2 flow rate of 3 sccm has the lowest friction coefficient in the dry and oily conditions.

Automated summary

Depositing TiAlVN coatings using a Ti50Al40V10 single alloying target via DC magnetron sputtering technique can improve the coating's structure and properties. The N2 content significantly influences the phase structure and hardness of the coating, with the best performance achieved at an N2 flow rate of 6 sccm.