Journal
JOURNAL OF LIGHTWAVE TECHNOLOGY
Volume 39, Issue 2, Pages 532-538Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2020.3030123
Keywords
Optical waveguides; Silicon; Propagation losses; Ribs; Annealing; Photonics; Smoothing methods; Annealing; loss measurement; photonic integrated circuits; silicon photonics; waveguide
Funding
- French national program IRT Nanoelec [ANR-10-AIRT-05]
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Ultra-low propagation losses in silicon sub-micrometric waveguides on a 200 mm CMOS compatible photonics platform were reported. Median losses in C-band (O-band) were as low as 0.1 dB/cm and 0.7 dB/cm (0.14 dB/cm and 1.1 dB/cm) in monomode rib and strip waveguides, respectively, thanks to a H-2 smoothing annealing. The performance characteristic of the main passive and active components of the photonics platform were preserved or even improved by the smoothing process.
We report ultra-low propagation losses in silicon sub-micrometric waveguides on a 200 mm CMOS compatible photonics platform. We show median losses in C-band (O-band) as low as 0.1 dB/cm and 0.7 dB/cm (0.14 dB/cm and 1.1 dB/cm) in monomode rib and strip waveguides, respectively, thanks to a H-2 smoothing annealing. In addition to the significant loss reduction, we show that the performance characteristic of the main passive and active components of the photonics platform are preserved or even improved by the smoothing process.
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