☆ 4.3 Article

Subsurface-damaged layer in (010)-oriented β-Ga2O3 substrates

JAPANESE JOURNAL OF APPLIED PHYSICS (2020)

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 59, Issue 12, Pages 125503

Publisher

IOP Publishing

DOI: 10.35848/1347-4065/abcb1c

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Categories

Physics, Applied

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