Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 12, Pages 5810-5814Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.3033779
Keywords
3-D displays; cylindrical ferroelectric capacitor (CFE-cap); HfO2; scaling
Funding
- National Natural Science Foundation of China [61804003, 61674008]
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As a typical cell structure, the cylindrical ferroelectric capacitor (CFE-cap) has been widely used in 3-D ferroelectric memories. Unlike planar ferroelectric capacitor, the CFE-cap has nonuniform electric field and polarization distribution. In this article, we investigate the impacts of the radius on the capacitance, field distribution, electrode charge densities of both the isotropic and anisotropic CFE-caps. As the inner radius increases, the CFE-cap behaves more like the planar capacitor with the same ferroelectric thickness. The results indicate that CFE-cap has an additional knob of inner radius R-in to tune its ferroelectric and electric characteristics. We have considered two kinds of CFE-caps, isotropic and anisotropic CFE-caps. The former is found to have stronger ferroelectric response than the latter, such as higher normalized capacitance and larger polarization.
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