Journal
VACUUM
Volume 183, Issue -, Pages -Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2020.109869
Keywords
Zinc oxide; Flexible thin film; RF Magnetron sputtering; Photoluminescence; XPS; XRD
Funding
- University of North Texas
- Toulouse Graduate School
- UNT Material Research Facility
Ask authors/readers for more resources
Spectroscopic and electrical studies of ZnO thin films grown by radio frequency magnetron sputtering at low power without substrate heating revealed improved stoichiometry and reduced free carrier concentration with increasingly energetic growth conditions. Hall measurements showed decreases in carrier concentration as power increased and deposition pressure decreased. These findings were well correlated with XRD, x-ray photoelectron spectroscopy, and photoluminescence results.
Spectroscopic and electrical studies of ZnO thin films grown by radio frequency magnetron sputtering at low power without substrate heating revealed improved stoichiometry and reduced free carrier concentration with increasingly energetic growth conditions, which is opposite to what is typically observed. Hall measurements showed a decrease in carrier concentration from 6.9 x 10(19) cm(-3) to 1.4 x 10(19) cm(-3) as power increased from 40 W to 120 W, and a decrease in carrier concentration from 8.6 x 10(19) cm(-3) to 2.6 x 10(19) cm(-3) as the deposition pressure decreased from 1.2 to 0.4 Pa. These findings correlated well with XRD, x-ray photoelectron spectroscopy and photoluminescence results, which showed that more energetic conditions increased the fraction of oxygen that was stoichiometrically bonded. The change in the absorption edge, likely due to a Burstein-Moss shift, was also in qualitative agreement. In the range of conditions used, energy transfer from the plasma to the growing film governs bonding, stoichiometry and hexagonal nanocrystalline film formation and growth.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available