A reproducible low temperature chemical solution deposition of non-polar [11(2)over-bar0] and [10(1)over-bar0] ZnO films for optoelectronic applications

ZnO films with non-polar a-plane (11 (2) over bar0) and m-plane (10 (1) over bar 0) orientations are fabricated on Si (100) substrates by low temperature chemical solution deposition. This distinctive growth is achieved by a co-effect of the seed layer templates and CBD solution. The growth mechanism is illustrated in detail and these non-polar ZnO/Si heterostructures show an excellent unidirectional conductivity which is comparable with other one-dimensional ZnO heterostructures.