4.5 Article

Anisotropic optical phonons in MOCVD grown Si-doped GaN/Sapphire epilayers

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ELSEVIER
DOI: 10.1016/j.mseb.2020.114615

Keywords

Micro-Raman spectroscopy; MOCVD; Bond-orbital model; Lattice relaxation effect; Impurity-vibrational modes

Funding

  1. State Key Laboratory of Luminescence and Applications, Chinese Academy of Sciences [SKLA-2019-06]
  2. Ministry of Science and Technology, Taiwan [MOST 108-2221-E-002-013-MY3]

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Micro-Raman spectroscopy is employed to study the anisotropic optical phonons of Si-doped GaN/Sapphire epifilms grown by metal organic chemical vapor deposition method. In an undoped 3.6 mu m thick sample - our polarized Raman measurements in the backscattering geometry revealed major first order modes of GaN and sapphire. Careful analyses of the second-order Raman spectra using critical-point-phonons from a rigid-ion model fitted inelastic X-ray spectroscopy data with appropriate selection rules helped us attain expedient data for the lattice dynamics of GaN. In Si-doped films, a modified phonon confinement model is used for simulating Raman line shapes of Ehigh 2 phonons to monitor crystalline quality. While the optical phonons in lightly doped samples are coupled to electron plasma- at higher carrier concentration the over-damped A(1)(LO) mode vanished in the background. For each sample we assessed the transport parameters by simulating Raman profiles of A(1)(LO) line shape with contributions from plasmon-LO-phonon and Lorentzian shaped Eg sapphire mode. A realistic Green's function theory is adopted to study the vibrational modes of Si donors and Mg acceptors in GaN by including force constant changes estimated from lattice relaxations using first-principles bond-orbital model. Theoretical results of impurity-activated modes compared favorably well with the existing Raman scattering data.

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