Fabrication and Demonstration of a Self-Adaptive Microvalve Array for Distributed Liquid Cooling in Microelectronic Interposers

We demonstrated the implementation and self-adaptive behavior of an array of thermostatic microvalves that locally control the water-cooling flow to prevent hot spots in microelectronics while minimizing the pumping power. This strategy enables the compact integration of multiple chips on an interposer without constraints of overheating or thermal cross talk. The performance of microfluidic cell array with self-adaptive valve is assessed experimentally, and compared to other conventional microchannel cooling device showing high efficiency and temperature uniformity. This paper presents the first MEMS implementation and experimental demonstration of this concept, which is part of the STREAMS European project. [2020-0198]