Journal
JOURNAL OF APPLIED PHYSICS
Volume 128, Issue 9, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/5.0011954
Keywords
-
Categories
Funding
- National Key Research and Development Plan [2017YFB0406402]
- National Natural Science Foundation of China [51772044]
Ask authors/readers for more resources
A 43 degrees rotated Y-cut LiNbO3 (LN) single-crystal thin film coated with a bottom electrode and a Mo/Ti Bragg reflector is successfully transferred onto the 4-in. LN wafer substrate by means of crystal-ion-slicing (CIS) technique and benzocyclobutene bonding method. The multilayer film is crack-free, and the Mo/Ti reflector shows good acoustic reflection efficiency. A thin film bulk acoustic wave resonator based on the Mo/Ti Bragg reflector and the LN thin film (LN-BAW) is prepared, and the properties are further analyzed. The results indicate that the LN-BAW provides a large K-t(2) of similar to 16.63% and the Q-factor and figure-of-merit of the LN-BAW reach 183 and 30.4, respectively.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
