Journal
CHINESE PHYSICS B
Volume 29, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1674-1056/abc2b8
Keywords
superconducting resonator; NbN; kinetic inductance; tunable resonator
Categories
Funding
- National Key R&D Program of China [2016YFA0301801]
- National Natural Science Foundation of China [11474154, 61521001]
- PAPD, Dengfeng Project B of Nanjing University
- Fundamental Research Funds for the Central Universities, China [14380134]
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We design and fabricate lambda/2 coplanar waveguide NbN resonators, the thickness and length of which are only several nanometers and hundred microns, respectively. The quality factor of such compact resonators can reach up to 7.5 x 10(4) at single photon power level at 30 mK with the resonance frequency around 6.835 GHz. In order to tune the resonant frequency, the resonator is terminated to the ground with a dc-SQUID. By tuning the magnetic flux in the dc-SQUID, the effective inductance of the dc-SQUID is varied, which leads to the change in the resonant frequency of the resonator. The tunability range is more than 30 MHz and the quality factor is about 3 x 10(3). These compact and tunable NbN resonators have potential applications in the quantum information processing, such as in the precision measurement, coupling and/or reading out the quantum states of qubits.
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