Journal
ARCHIVE OF APPLIED MECHANICS
Volume 91, Issue 1, Pages 23-32Publisher
SPRINGER
DOI: 10.1007/s00419-020-01795-z
Keywords
Multiple-layer microbeams; Modified couple stress theory; Size dependency; Free vibration; MEMS
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The modified couple stress theory (MCST) is applied to investigate the size effect on dynamic response of multiple-layer microbeams in this study. Governing equations are derived using MCST and Hamilton's principle, followed by analytical calculation of natural frequencies. The results highlight the significant influence of material length-scale parameters and dimensions of each layer on the vibration characteristics of multiple-layer microbeams.
The modified couple stress theory (MCST) is used to capture size effect on dynamic response in multiple-layer microbeams in the present article. Governing equations of the system are obtained based on the MCST and using Hamilton's principle. The natural frequencies of the multiple-layer microbeam are calculated using the analytical method. Then, the results of the natural frequencies are presented with respect to different values of the system parameters such as the geometric layers and also the dimensionless material length-scale parameter. The results show that the material length-scale parameter values and also the length, width, and thickness of each layer are extremely effective on the vibration characteristic of the multiple-layer microbeams.
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