Journal
APPLIED SURFACE SCIENCE
Volume 526, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2020.146738
Keywords
Boron-doped diamond; Heat treatment; Conductivity; Hydrogen plasma; Boron oxide
Categories
Funding
- 'Fundamental Research Funds for the Central University', PR China
Ask authors/readers for more resources
The electrical conductivity of Boron-doped diamond (BDD) films prepared by the mixture of methanol/acetone/B2O3 was significantly improved after hydrogen plasma and vacuum heat treatment. SEM and Raman spectro-scopy were used to characterize the change of morphology and quality of BDD film after heat treatment, and the electrical properties of BDD film were determined by Hall effect. The chemical bonding states of boron atoms were analyzed by X-ray photoelectron spectroscopy. A mechanism at the origin of the improved conductivity after the heat treatments was proposed. It is oxygen that provides new vacancies for the addition of more boron atoms at grain boundary into crystal lattice, thus enhancing the electrical properties. There are different roles of oxygen in different heat treatments.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available