4.7 Review

Flexible oxide epitaxial thin films for wearable electronics: Fabrication, physical properties, and applications

Journal

JOURNAL OF MATERIOMICS
Volume 6, Issue 2, Pages 385-396

Publisher

ELSEVIER
DOI: 10.1016/j.jmat.2019.12.006

Keywords

Flexible; Epitaxial thin films; Fabrication; Physical properties

Funding

  1. National Science Foundation of China [61631166004]
  2. Shenzhen KQTD project [KQTD20180411143514543]
  3. Shenzhen JCYJ project [JCYJ20180504165831308]
  4. Shenzhen DRC project [[2018]1433]
  5. Doctoral Scientific Research Startup Foundation of Shaanxi University of Science and Technology [2019BJ-30]

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Recently, flexible oxide epitaxial thin films are of increasing interests owing to their excellent physical properties and wide applications. The oxide epitaxial thin films with flexible, lightweight and wearable are promising for the applications in flexible and wearable devices, such as flexible sensors, flexible detectors, flexible oscillators, flexible spintronics, wearable displays and electronic skin, etc. This review aims to summarize the fabrication, physical properties and applications of the flexible oxide epitaxial thin films for wearable electronics in most recent few years. The fabrication of flexible oxide epitaxial thin films reviewed here mainly includes the deposition on flexible substrates at high temperature and epitaxial lift-off ( ELO) from rigid substrates. The physical properties and applications of flexible oxide epitaxial thin films reviewed here chiefly focus on the area of electricity and magnetism, including stable and tunable physical properties in the flexible oxide epitaxial thin films. In final, the perspectives and challenges of flexible oxide thin films for wearable electronics have been also addressed. (C) 2019 The Chinese Ceramic Society. Production and hosting by Elsevier B.V.

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