Study of indium tin oxide films deposited on colorless polyimide film by magnetron sputtering

Polyimide attracted most interest for its high performance as a flexible substrate of touch panels. Experimental models were built to evaluate production feasibility. The solution with monomer was coated on a glass substrate, cured at 250 degrees C to form a solid colorless polyimide (CPI) film. Then, a supporting layer with silicon oxide and a conducting layer with indium tin oxide (ITO) were deposited on the CPI film by magnetron sputtering. Composite with a CPI substrate and ITO patterns were prepared via a series of procedures. Test results indicated ITO film thickness and sheet resistance could be controlled by adjusting sputtering power, and the film showed smooth curves on the contour line chart. The transmittance of CPI/ITO film composite was up to 80%. The bending durability of the film was evaluated by two-point bending method, and it could be significantly improved by shielding the ITO pattern with ultraviolet cured resin as an external buffer layer. Samples with buffer layers passed 64,000 cycles bend test, and the minimum fracture radius reached 4 mm. The increase of ITO film thickness had no significant negative impact on the performance of flexible devices. (C) 2020 Shantou Goworld Display Technology Co., Ltd. Published by Elsevier Ltd.