Design of Unimorph Type 3DOF Ultrasonic Motor

A new design of 3 degrees of freedom (DOF) piezoelectric ultrasonic motor (USM) is introduced in this paper. The concept of this design is to incorporate a spherical rotor between two piezoelectric transducers. Each transducer is coupled with a flange, and it operates like a unimorph structure. Such a design of the transducer allows to increase the amplitude of the vibrations and to generate the higher torque and driving force used to achieve 3DOF rotary motion of the spherical rotor. The proposed USM may be used for humanoid robots, optomechanical systems, or small satellites. This USM consists of several components, is lightweight and reliable. Numerical analysis and experimental studies were performed to validate the feasibility of this drive, to find out proper resonant frequencies for the unimorph, and optimize the shape of the flange. Experimental studies were accomplished to validate the results of the numerical analysis and to validate the operating principles of the piezoelectric motor.