Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 29, Issue 8, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab9b1b
Keywords
cold plasma; CCP discharge; N(2)H(2)mixture; modeling; plasma surface interactions
Categories
Funding
- Portuguese Foundation for Science and Technology (FCT) [UID/FIS/50010/2019, SFRH/BSAB/150267/2019, UIDB/04650/2019, UTAP-EXPL/NTec/0107/2017]
- European Research Council (ERC) [636829]
- Fundação para a Ciência e a Tecnologia [UTAP-EXPL/NTec/0107/2017, SFRH/BSAB/150267/2019] Funding Source: FCT
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In this work, we present the results of simulations carried out for N-2-H(2)capacitively coupled radio-frequency discharges, running at low pressure (0.3-0.9 mbar), low power (5-20 W), and for amounts of H(2)up to 5%. Simulations are performed using a hybrid code that couples a two-dimensional time-dependent fluid module, describing the dynamics of the charged particles in the discharge, to a zero-dimensional kinetic module, that solves the Boltzmann equation and describes the production and destruction of neutral species. The model accounts for the production of several vibrationally and electronic excited states, and contains a detailed surface chemistry that includes recombination processes and the production of NH(x)molecules. The results obtained highlight the relevance of the interactions between plasma and surface, given the role of the secondary electron emission in the electrical parameters of the discharge and the critical importance of the surface production of ammonia to the neutral and ionic chemistry of the discharge.
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