Journal
OPTICS AND LASERS IN ENGINEERING
Volume 135, Issue -, Pages -Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2020.106192
Keywords
Three-dimensional sensing; Microscopic; Fringe projection; Optical metrology
Categories
Funding
- National Key R&D Program of China [2017YFF0106403]
- National Natural Science Fund of China [61722506, 61705105, 111574152]
- Final Assembly 13th Five-Year Plan Advanced Research Project of China [30102070102]
- Equipment Advanced Research Fund of China [61404150202, 61404130314]
- Key Research and Development Program of Jiangsu Province, China [BE2017162]
- Outstanding Youth Foundation of Jiangsu Province of China [BK20170034]
- National Defense Science and Technology Foundation of China [0106173]
- Six Talent Peaks Project of Jiangsu Province, China [2015-DZXX-009]
- 333 Engineering Research Project of Jiangsu Province, China [BRA2016407]
- Fundamental Research Funds for the Central Universities [30917011204, 30916011322]
- Open Research Fund of Jiangsu Key Laboratory of Spectral Imaging & Intelligent Sense [3091801410403, 3091601410414]
- China Postdoctoral Science Foundation [2019M661843]
- Special Project on Basic Research of Frontier Leading Technology of Jiangsu Province of China [BK20192003]
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Structured light three-dimensional (3D) measurement technology is considered one of the most reliable 3D data acquisition methods. Driven by the demand for high-precision 3D data acquisition for miniaturized samples in many fields such as surface condition analysis, mechanical function test, and micro-electro-mechanical systems (MEMS) quality inspection, microscopic fringe projection profilometry (MFPP) has been developed rapidly during recent decades. Significant progress has been made in different aspects of MFPP, including its optical configurations, corresponding system calibrations, phase retrieval algorithms, and 3D coordinate reconstruction methods. In addition, the rapid advance in high-frame-rate image sensors, high-speed digital projection technology, and high-performance processors become a powerful vehicle that motivates MFPP techniques to be increasingly applied in high-speed, real-time 3D shape measurement of dynamic samples. In this paper, we present an overview of these state-of-the-art MFPP works by analyzing and comparing the measurement principles, systems structures, and key performance indexes such as the accuracy, field of view (FOV), and speed. We also discuss the potential applications of MFPP and give some recommendations about optimum MFPP optical system design for reference in related applications in the future.
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