4.8 Article

Ferroelectric domain wall memory with embedded selector realized in LiNbO3single crystals integrated on Si wafers

Journal

NATURE MATERIALS
Volume 19, Issue 11, Pages 1188-+

Publisher

NATURE PORTFOLIO
DOI: 10.1038/s41563-020-0702-z

Keywords

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Funding

  1. Basic Research Project of Shanghai Science and Technology Innovation Action [17JC1400300]
  2. National Key R&D Programme of China [2019YFA0308500]
  3. National Natural Science Foundation of China [61674044, 11572040]
  4. Programme of Shanghai Subject Chief Scientist [17XD1400800]
  5. Beijing Natural Science Foundation [Z190011]
  6. Strategic Priority Research Programme of the Chinese Academy of Sciences [XDB07030200]
  7. Samsung Research Funding & Incubation Center of Samsung Electronics [SRFC-TA1703-02]
  8. National Research Foundation of Korea [4120200513611] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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Interfacial 'dead' layers between metals and ferroelectric thin films generally induce detrimental effects in nanocapacitors, yet their peculiar properties can prove advantageous in other electronic devices. Here, we show that dead layers with low Li concentration located at the surface of LiNbO3 ferroelectric materials can function as unipolar selectors. LiNbO3 mesa cells were etched from a single-crystal LiNbO3 substrate, and Pt metal contacts were deposited on their sides. Poling induced non-volatile switching of ferroelectric domains in the cell, and volatile switching in the domains in the interfacial (dead) layers, with the domain walls created within the substrate being electrically conductive. These features were also confirmed using single-crystal LiNbO3 thin films bonded to SiO2/Si wafers. The fabricated nanoscale mesa-structured memory cell with an embedded interfacial-layer selector shows a high on-to-off ratio (>10(6)) and high switching endurance (similar to 10(10) cycles), showing potential for the fabrication of crossbar arrays of ferroelectric domain wall memories.

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