Research on micro-cavity structure processing technology based on porous silicon

Aiming at the problem of heterogeneity of sealed cavity in silicon microstructure processing technology, the technology of preparing micro-cavity by using porous silicon sacrificial layer is proposed. The effect of current density on the preparation of porous silicon and the effect of porous silicon with different porosity on the formation of micro-cavity in the preparation process of porous silicon were studied. Different process parameters were selected for experiments and the prepared micro-cavities were tested and analyzed. According to the test results, the suitable electrochemical corrosion process parameters were selected to prepare porous silicon, and the micro-cavity was realized by changing the process parameters, which greatly increased the application fields of micro-sensors and micro-actuators.