Journal
MICROELECTRONIC ENGINEERING
Volume 232, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.mee.2020.111403
Keywords
Multi-walled carbon nanotubes; Plasma-treatment; Gas sensor; Sensor response; Composite
Categories
Funding
- Slovenian Research Agency (ARRS) [P2-0082, L2-6769]
- Ministry of Education, Youth and Sports of the Czech Republic-Program NPU I [LO1504]
- Operational Program Research and Development for Innovations - European Regional Development Fund
- National budget of the Czech Republic [CZ.1.05/2.1.00/19.0409]
- AD FUTURA, Public Scholarship, Development, Disability, and Maintenance Fund of the Republic of Slovenia
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Entangled multi-walled carbon nanotubes (MWCNTs) on polyurethane (PUR) after Ar plasma-treatment and He plasma-treatment have been tested as gas sensors for ethanol sensing. It was found that plasma-treated sensors exhibit higher sensitivity compared to the non-treated samples along with different ethanol concentration. Non treated sensors exhibit similar sensor response with the increase in ethanol concentration, while Ar plasma treated sensors displays-5 times improvement and He plasma-treated sensors show-3 times improvement with an increase in ethanol concentration. The sensitivity of the plasma-treated sensors is also stable for following two-weeks after the preparation compared to the non-treated sensor. Entangled nanotube network exhibits a significant shift in the baseline resistance after both plasma-treatments. The response time of the sensor was increased after the plasma-treatment, while the recovery was rather quick. Surface analyses revealed that plasma-treatment did not make any significant morphological changes. Thus, the improvements in stability and sensitivity after plasma-treatment are attributed to the plasma-enhanced surface modification and formation of functional bonds on the surface of nanotubes, which are sensitive to the ethanol vapour.
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