Journal
MATERIALS LETTERS
Volume 273, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.matlet.2020.127924
Keywords
Pd/SnO2; NiO thin films; Composite materials; Sputtering; Ethanol gas detection; XPS; MEMS gas sensor
Funding
- National Natural Science Foundation of China [51602314]
Ask authors/readers for more resources
Here, we disclose the Pd-doped SnO2:NiO sensing films integrated on the microheaters by a facile co-sputtering method. The Pd content is controlled by the sputtering power, and thermal annealing at 500 degrees C in H-2 is implemented to activate the hybrid Pd/SnO2:NiO film. The 20 nm-thick Pd/SnO2:NiO films with Pd sputtering power of 20 W exhibits significantly enhanced ethanol sensing performance, with the response of 12 to 50 ppm ethanol, low detection limit of <5 ppm, high selectivity, good stability and low device-to-device variation of <15%. The gas sensing property enhancement can be predominantly attributed to the Schottky barrier at Pd-SnO2 interface and the Pd-induced catalytic oxidation of ethanol. These results enable the fabrication of wafer-scale micro ethanol gas sensors with low energy dissipation using the entire Micro-Electrical-Mechanical System (MEMS) strategy. (C) 2020 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available