Journal
APPLIED PHYSICS EXPRESS
Volume 13, Issue 9, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.35848/1882-0786/aba5c4
Keywords
thermoelectrics; silicon; phonon engineering; micro power generator
Categories
Funding
- JST CREST [JPMJCR19Q3]
- JST Mirai [JPMJMI19A1]
- Kakenhi [15H05869, 17H02729]
- Grants-in-Aid for Scientific Research [17H02729] Funding Source: KAKEN
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We demonstrate the power enhancement of planar-type uni-leg poly-Si thermoelectric generators by nano-patterning. The thermoelectric generators were fabricated on an SOI wafer by a conventional lithography-based process. The size of the phononic nano-patterning (300 nm in period) was designed based on the thermal phonon mean free path spectrum. The thermal conductivity of the Si membrane was reduced by 60% compared with an unpatterned one, which resulted in the doubled thermoelectric figure-of-merit. The nano-patterning increased the temperature gradient in the Si membrane and resulted in a four times higher voltage and ten times larger power density.
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