Reconfigurable nano-kirigami metasurfaces by pneumatic pressure

Tunable/reconfigurable metasurfaces that can actively control electromagnetic waves upon external stimuli are of great importance for practical applications of metasurfaces. Here, we demonstrate a reconfigurable nano-kirigami metasurface driven by pneumatic pressure operating in the near-infrared wavelength region. The metasurfaces consist of combined Archimedean spirals and are fabricated in a free-standing gold/silicon nitride nanofilm by employing focused ion beam (FIB) lithography. The deformable spirals are instantly transformed from two dimensional (2D) to three-dimensional (3D) by the FIB-based nano-kirigami process. The 2D-to-3D transformation induces a dramatic irreversible change of the plasmonic quadruple modes and results in significant modulation in reflection by 137%. The suspended porous nano-kirigami metasurface is further integrated with an optofluidics device, with which the optical resonance is reversibly modulated by the pneumatic pressure. This work provides a strategy for tunable/reconfigurable metasurfaces, which are useful to build a promising lab-on-a-chip platform for microfluidics, biological diagnostics, chemical sensing, and pressure monitoring. (c) 2020 Chinese Laser Press