Journal
CARBON LETTERS
Volume 30, Issue 6, Pages 595-601Publisher
SPRINGER JAPAN KK
DOI: 10.1007/s42823-020-00129-x
Keywords
SU-8 photoresist; Deep UV; Electric heater; Carbonization; Carbon thin film
Funding
- Korea Institute of Energy Technology Evaluation and Planning (KETEP) - Ministry of Trade, Industry AMP
- Energy (MOTIE) of the Republic of Korea [20164010201070]
Ask authors/readers for more resources
We report the structural characterization and electric heating performance of carbon thin films (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 degrees C and a rapid heating rate of 13.2 degrees C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available