Journal
MATERIALS
Volume 13, Issue 10, Pages -Publisher
MDPI
DOI: 10.3390/ma13102402
Keywords
surface delamination; graphite substrate; atomic layer deposition; combined imaging; surface tension
Categories
Funding
- Ministry of Industry and Trade of the Czech Republic, MPO-TRIO project [FV10618]
- Czech Academy of Sciences [RVO:68081731]
- Ministry of Education, Youth and Sports of the Czech Republic under the project CEITEC 2020 [LQ1601]
- Technology Agency of the Czech Republic [TJ01000434]
- Internal Grant Agency of Brno University of Technology [FEKT-S-20-6352]
- CEITEC Nano Research Infrastructure, CEITEC Brno University of Technology [LM2015041]
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The objective of this work is to study the delamination of bismuth ferrite prepared by atomic layer deposition on highly oriented pyrolytic graphite (HOPG) substrate. The samples' structures and compositions are provided by XPS, secondary ion mass spectrometry (SIMS) and Raman spectroscopy. The resulting films demonstrate buckling and delamination from the substrates. The composition inside the resulting bubbles is in a gaseous state. It contains the reaction products captured on the surface during the deposition of the film. The topography of Bi-Fe-O thin films was studied in vacuum and under atmospheric conditions using simultaneous SEM and atomic force microscopy (AFM). Besides complementary advanced imaging, a correlative SEM-AFM analysis provides the possibility of testing the mechanical properties by using a variation of pressure. In this work, the possibility of studying the surface tension of the thin films using a joint SEM-AFM analysis is shown.
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