Journal
ULTRAMICROSCOPY
Volume 215, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.ultramic.2020.112993
Keywords
Scanning transmission electron microscopy; Electron energy loss spectroscopy; Atomic-scale images; Spectrum-images; Partial acquisition; Fast reconstruction
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Funding
- CNRS, France, through the Imagin ARSIS project
- METSA [17A304]
- ANR-3IA Artificial and Natural Intelligence Toulouse Institute (ANITI) [ANR-19-PI3A-0004]
- European Union [823717]
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This paper discusses the reconstruction of partially sampled spectrum -images to accelerate the acquisition in scanning transmission electron microscopy (STEM). The problem of image reconstruction has been widely considered in the literature for many imaging modalities, but only a few attempts handled 3D data such as spectral images acquired by STEM electron energy loss spectroscopy (EELS). Besides, among the methods pro- posed in the microscopy literature, some are fast but inaccurate while others provide accurate reconstruction but at the price of a high computation burden. Thus none of the proposed reconstruction methods fulfills our ex- pectations in terms of accuracy and computation complexity. In this paper, we propose a fast and accurate reconstruction method suited for atomic -scale EELS. This method is compared to popular solutions such as beta process factor analysis (BPFA) which is used for the first time on STEM -EELS images. Experiments based on real as synthetic data will be conducted.
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