Journal
SENSORS
Volume 20, Issue 5, Pages -Publisher
MDPI
DOI: 10.3390/s20051514
Keywords
field effect gas sensor; MIS structure type Pd-SnO2-SiO2-Si; NO2 gas detection in ppb level; pyrolysis of nitro compound vapor
Funding
- Russian Science Foundation [18-79-10230]
- Russian Science Foundation [18-79-10230] Funding Source: Russian Science Foundation
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A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal-insulator-semiconductor (MIS) structure type Pd-SiO2-Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 x 10(-9) g, which corresponds to concentration from 10(-11) g/cm(3) to 10(-12) g/cm(3). The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
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