Journal
CHEMISTRY OF MATERIALS
Volume 28, Issue 10, Pages 3435-3445Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.chemmater.6b00853
Keywords
-
Funding
- FWO Vlaanderen
- Hercules project [AUGE/09/014]
- IWT-SBO SOSLion project
- ERA-LaminaLion project
- [UGENT-GOA-01G01513]
Ask authors/readers for more resources
A new plasma-enhanced atomic layer deposition process was developed to deposit iron phosphate by using a sequence of trimethyl phosphate (TMP, Me3PO4) plasma, O-2 plasma, and tert-butylferrocene (TBF, Fe(C5H5)(C5H4C-(CH3)(3))) exposures. Using in situ spectroscopic ellipsometry and ex situ X-ray reflectometry, the growth linearity, growth per cycle (GPC), and density of the resulting thin films was investigated as a function of the pulse times and the substrate temperature. At a substrate temperature of 300 degrees C and using saturated pulse times, an exceptionally high GPC of 1.1 nm/cycle without nucleation delay was achieved, resulting in amorphous films with an empirical stoichiometry of FeP1.5O4.7 with 0.9% hydrogen and no detectable carbon residue. Trigonal FePO4 (Berlinite) was formed upon annealing in air. Remarkably, annealing in helium resulted in the formation of elemental phosphorus. The as-deposited, amorphous material became active as a Li-ion cathode after an initial irreversible electrochemical lithiation, showing insertion and extraction of Li+ around a potential of 3.1 V vs Li/Li+. By conformally depositing the same material on a 3D-microstructured substrate consisting of Pt-coated Si micropillars, the capacity could be drastically increased without sacrificing rate performance.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available