Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 29, Issue 6, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab9483
Keywords
plasma jet; inductively; microwave; miniature; ICP; RF
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Funding
- Deutsche Forschungsgemeinschaft DFG [389090373]
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Radio frequency driven plasma jets are compact plasma sources which are used in many advanced fields such as surface engineering or biomedicine. The MMWICP (miniature micro wave ICP) is a particular variant of that device class. Unlike other plasma jets which employ capacitive coupling, the MMWICP uses the induction principle. The jet is integrated into a miniature cavity structure which realizes an LC-resonator with a high quality factor. When excited at its resonance frequency, the resonator develops a high internal current which-transferred to the plasma via induction-provides an efficient source of RF power. This work presents a theoretical model of the MMWICP. The possible operation points of the device are analyzed. Two different regimes can be identified, the capacitiveE-mode with a plasma density ofn(e)approximate to 5 x 10(17)m(-3), and the inductiveH-mode with densities ofn(e)> 10(19)m(-3). TheEtoHtransition shows a pronounced hysteresis behavior.
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