Journal
NANO LETTERS
Volume 20, Issue 6, Pages 4169-4176Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.0c00483
Keywords
Optical gas sensing; mid-infrared photonics; metamaterials; electronic photonic cointegration; thermal emission engineering
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Funding
- Swiss National Science Foundation through Sinergia [CRSII2_147615]
- NCCR Quantum Science and Technology
- [ETH-45 14-2]
- Swiss National Science Foundation (SNF) [CRSII2_147615] Funding Source: Swiss National Science Foundation (SNF)
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The miniaturization of mid-infrared optical gas sensors has great potential to make the fingerprint region between 2 and 10 mu m accessible to a variety of cost-sensitive applications ranging from medical technology to atmospheric sensing. Here we demonstrate a gas sensor concept that achieves a 30-fold reduction in absorption volume compared to conventional gas sensors by using plasmonic metamaterials as on-chip optical filters. Integrating metamaterials into both the emitter and the detector cascades their individual filter functions, yielding a narrowband spectral response tailored to the absorption band of interest, here CO2. Simultaneously, the metamaterials' angle-independence is maintained, enabling an optically efficient, millimeter-scale cavity. With a CO2 sensitivity of 22.4 +/- 0.5 ppm.Hz(-0.5), the electrically driven prototype already performs at par with much larger commercial devices while consuming 80% less energy per measurement. The all-metamaterial sensing concept offers a path toward more compact and energy-efficient mid-infrared gas sensors without trade-offs in sensitivity or robustness.
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