Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 28, Issue 1, Pages 377-382Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00542-020-04856-z
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- Ministry of Science and Technology [MOST 108-2622-E-150-010-CC3, MOST 107-2622-E-150-002-CC2, 106-2221-E-150-041-MY3, 106-2622-E-150-005-CC3, 106-2622-E-150-017-CC2]
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This paper mainly discusses the properties of aluminum-doped zinc oxide nanorods grown by hydrothermal method with low temperature. The conductive properties of the zinc oxide nanorods were changed by adding chemical substances, and their surface morphology, element content, internal structure, and optical properties were further observed. The experimental results showed that, under methyl alcohol surroundings, the aluminum-doped zinc oxide nanorods sensor was more sensitive than the pure zinc oxide nanorods sensor.
In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)(2)center dot 6H(2)O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)(3)center dot 9H(2)O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.
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