4.5 Article

Direct Observation of the Surface Topography at High Temperature with SEM

Journal

MICROSCOPY AND MICROANALYSIS
Volume 26, Issue 3, Pages 397-402

Publisher

CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927620001348

Keywords

3D surface reconstruction; high temperature; SEM; topography

Funding

  1. Region Occitanie

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High-temperature scanning electron microscopy allows the direct study of the temperature behavior of materials. Using a newly developed heating stage, tilted images series were recorded at high temperature and 3D images of the sample surface were reconstructed. By combining 3D images recorded at different temperatures, the variations of material roughness can be accurately described and associated with local changes in the topography of the sample surface.

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