Journal
MICROELECTRONIC ENGINEERING
Volume 227, Issue -, Pages -Publisher
ELSEVIER
DOI: 10.1016/j.mee.2020.111312
Keywords
Laser materials processing; Security marking; Microstructure fabrication; Computer-generated holograms; Metals
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Holographic optical elements (HOE) are fabricated on silver by means of laser engraving using a cost effective ns fiber laser system developed for this scope, emitting at 1070 nm, for the first time to the authors' knowledge. Various HOEs are designed using commercially available software and fabricated on the sample surface. The developed methodology is presented and analyzed in terms of laser parameters. The fabricated HOEs are evaluated both structurally and optically.
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