Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 38, Issue 3, Pages -Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/6.0000057
Keywords
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Funding
- Swedish Research Council VR [2018-03957]
- Carl Tryggers Stiftelse Contract [CTS 17:166]
- DOE Office of Biological and Environmental Research
- Swedish Research Council [2018-03957] Funding Source: Swedish Research Council
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This guide deals with methods to control surface charging during XPS analysis of insulating samples and approaches to extracting useful binding energy information. The guide summarizes the causes of surface charging, how to recognize when it occurs, approaches to minimize charge buildup, and methods used to adjust or correct XPS photoelectron binding energies when charge control systems are used. There are multiple ways to control surface charge buildup during XPS measurements, and examples of systems on advanced XPS instruments are described. There is no single, simple, and foolproof way to extract binding energies on insulating material, but advantages and limitations of several approaches are described. Because of the variety of approaches and limitations of each, it is critical for researchers to accurately describe the procedures that have been applied in research reports and publications.
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