Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 59, Issue -, Pages -Publisher
IOP Publishing Ltd
DOI: 10.35848/1347-4065/ab7f1f
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Funding
- JSPS KAKENHI Grant [JP 17H06293, JP 15H01786]
- JST CREST Grant, Japan [JPMJCR1532]
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In this brief review, applications of lifetime distribution functions with two shape parameters for reliability analysis are introduced in advanced interconnect technologies. For the time-dependent dielectric breakdown analysis, the time-dependent clustering model is applied. Suppressing the trade-off between two shape parameters is required for an accurate estimation of the clustering parameter. Some statistical techniques, including the sudden-death test structure and the Bayesian inference, are reviewed. For simple electromigration evaluation on a chip-level, an adaption of the generalized Gamma distribution is proposed. The impacts of the circuit scale and the segment variations are investigated with the Monte-Carlo technique. This review suggests that variation control will become ever more important for advanced interconnect technology developments. (C) 2020 The Japan Society of Applied Physics
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