Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 67, Issue 4, Pages 1757-1763Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.2974194
Keywords
Mathematical model; Conductivity; Resistance; Substrates; Metals; Semiconductor device measurement; Resistors; Accuracy; contact resistivity; metal-semiconductor junctions; photovoltaics; resistance; test structures
Funding
- Topconsortia for Knowledge and Innovation Solar Energy program of the Ministry of Economic Affairs of The Netherlands [TEUE116139, 1721101]
- Netherlands Organisation for Scientific Research under the Dutch TTW-VENI Grant [15896]
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The Cox-Strack method is commonly applied to assess the contact resistivity between a metal and a semiconductor since the 1960s, while the underlying assumptions have not yet been rigorously assessed. In this article, a combination of finite-element modeling and mathematical analysis is used to investigate the accuracy of the conventional Cox-Strack equation for generic metal-semiconductor junctions. A systematic error in the spreading resistance equation is quantified, and alternative, more accurate equations are presented. Furthermore, it is shown that commonly used experimental configurations can lead to highly overestimated contact resistivities. Guidelines are formulated for accurate extraction of the contact resistivity from the Cox-Strack measurements.
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